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Proceedings Paper

Design of linear and nonlinear hybrid optical MEMS displacement sensors
Author(s): Wilfried Hortschitz; Franz Kohl; Harald Steiner; Matthias Sachse; Michael Stifter; Johannes Schalko; Artur Jachimowicz; Franz Keplinger
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Paper Abstract

Although capacitive and piezoresistive readouts are commonly used for microelectromechanical structures, they suffer from serious drawbacks like limited range of displacement, inherent nonlinearity, insucient sensitivity, and technological complexity. Our complementary readout approach relies on a novel hybrid optomechanical device, where the displacement range is not limited by typical constraints of capacitive or piezoresistive conversion principles. Furthermore, no electrical connections are required on the micromechanical part. Moreover, this principle enables custom linear or nolinear output characteristics at the same technological effort.

Paper Details

Date Published: 5 May 2011
PDF: 9 pages
Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 80660P (5 May 2011); doi: 10.1117/12.887631
Show Author Affiliations
Wilfried Hortschitz, Institute for Integrated Sensor Systems (Austria)
Franz Kohl, Institute for Integrated Sensor Systems (Austria)
Harald Steiner, Institute for Integrated Sensor Systems (Austria)
Matthias Sachse, Institute for Integrated Sensor Systems (Austria)
Michael Stifter, Institute for Integrated Sensor Systems (Austria)
Johannes Schalko, Institute for Integrated Sensor Systems (Austria)
Vienna Univ. of Technology (Austria)
Artur Jachimowicz, Vienna Univ. of Technology (Austria)
Franz Keplinger, Vienna Univ. of Technology (Austria)


Published in SPIE Proceedings Vol. 8066:
Smart Sensors, Actuators, and MEMS V
Ulrich Schmid; José Luis Sánchez-Rojas; Monika Leester-Schaedel, Editor(s)

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