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Proceedings Paper

High-throughput beam splitters for high-order harmonics in soft-x-ray region
Author(s): Masatoshi Hatayama; Eiji J. Takahashi; Hisataka Takenaka; Eric M. Gullikson; Katsumi Midorikawa
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Paper Abstract

We demonstrated two high-throughput beam splitters for high-order harmonics in soft-x-ray region, an extremely-flat free-standing thin-film filter and a high-damage-threshold reflective beam splitter. The Al thin-film filter, which is coated with a SiC film to increase its oxidation tolerance, has a transmittance of 29% at 30 nm and the Si plate beam splitter set at Brewster's angle with respect to the pump wavelength has a reflectivity of 56% at 30 nm.

Paper Details

Date Published: 18 May 2011
PDF: 7 pages
Proc. SPIE 8077, Damage to VUV, EUV, and X-ray Optics III, 80770T (18 May 2011); doi: 10.1117/12.887561
Show Author Affiliations
Masatoshi Hatayama, NTT Advanced Technology Corp. (Japan)
Eiji J. Takahashi, RIKEN (Japan)
Hisataka Takenaka, NTT Advanced Technology Corp. (Japan)
Eric M. Gullikson, Lawrence Berkeley National Lab. (United States)
Katsumi Midorikawa, RIKEN (Japan)

Published in SPIE Proceedings Vol. 8077:
Damage to VUV, EUV, and X-ray Optics III
Libor Juha; Saša Bajt; Richard A. London, Editor(s)

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