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Proceedings Paper

Modeling and characterization of a circular-shaped energy scavenger in MEMS surface micromachining technology
Author(s): F. Solazzi; J. Iannacci; A. Faes; F. Giacomozzi; B. Margesin; A. Tazzoli; G. Meneghesso
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Paper Abstract

This work reports the analysis, modeling and characterization of an electrostatic vibration-to-electric energy scavenger. The scavenger was manufactured by the FBK in-house foundry by using a MEMS (Micro-Electro- Mechanical System) surface micro-machining technology. Extensive finite element analyses (FEA) were performed for the compact modeling of the device and presented here. The scavenger was characterized by means of dynamical measurements as a further validation of the FE model. A random vibration analysis is also utilized for the emulation of the real device operating conditions.

Paper Details

Date Published: 5 May 2011
PDF: 8 pages
Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 806614 (5 May 2011); doi: 10.1117/12.887559
Show Author Affiliations
F. Solazzi, Fondazione Bruno Kessler (Italy)
J. Iannacci, Fondazione Bruno Kessler (Italy)
A. Faes, Fondazione Bruno Kessler (Italy)
F. Giacomozzi, Fondazione Bruno Kessler (Italy)
B. Margesin, Fondazione Bruno Kessler (Italy)
A. Tazzoli, Univ. of Padova (Italy)
IUNET (Italy)
Univ. of Pennsylvania (United States)
G. Meneghesso, Univ. of Padova (Italy)
IUNET (Italy)

Published in SPIE Proceedings Vol. 8066:
Smart Sensors, Actuators, and MEMS V
Ulrich Schmid; José Luis Sánchez-Rojas; Monika Leester-Schaedel, Editor(s)

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