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Proceedings Paper

Nanometer gap detection method using GMR grating
Author(s): Zihuan Xia; Yonggang Wu; Leijie Ling; Gang Lv; Heyun Wu
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Paper Abstract

In this paper the displacement of the reflection resonant peak resulting from the change of the gap between the guided-mode resonance (GMR) grating and substrate is used to measure the nanometer gap. The paper calculates double layer model and metal substrate model using rigorous coupled-wave analysis (RCWA). It is revealed that nano-gap detection using GMR grating is feasible for both dielectric and metal substrate. The detection range of resonant wavelength and gap is tunable. The detect sensitivity is investigated by varying the parameters of grating (thickness, period and refractive index), the thickness of films, and polarization. Tolerance of grating implies an advantage for manufacture. An optimized result presents an 18nm resonant shift for 100nm gap with the max sensitivity achieving 0.85.

Paper Details

Date Published: 18 February 2011
PDF: 4 pages
Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 79952N (18 February 2011); doi: 10.1117/12.887554
Show Author Affiliations
Zihuan Xia, Tongji Univ. (China)
Yonggang Wu, Tongji Univ. (China)
Leijie Ling, Tongji Univ. (China)
Gang Lv, Tongji Univ. (China)
Heyun Wu, Tongji Univ. (China)

Published in SPIE Proceedings Vol. 7995:
Seventh International Conference on Thin Film Physics and Applications
Junhao Chu; Zhanshan Wang, Editor(s)

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