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Proceedings Paper

Gas sensors based on MEMS structures made of ceramic ZrO2/Y2O3 material
Author(s): A. A. Vasiliev; A. S. Lipilin; A. S. Lagutin; A. V. Pisliakov; N. P. Zaretskiy; N. N. Samotaev; A. V. Sokolov
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Paper Abstract

The methods of the fabrication of MEMS platforms based on yttria stabilized zirconia (YSZ) and alumina membranes for gas sensors used in harsh environmental conditions are described. It is shown that the application of such membranes permits a decrease in MEMS power consumption at 450°C down to ~75 mW at continuous and down to ~ 1 mW at pulse heating of gas sensor.

Paper Details

Date Published: 5 May 2011
PDF: 7 pages
Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 80660N (5 May 2011); doi: 10.1117/12.887500
Show Author Affiliations
A. A. Vasiliev, Kurchatov Institute (Russian Federation)
A. S. Lipilin, Institute of Electrophysics (Russian Federation)
A. S. Lagutin, Kurchatov Institute (Russian Federation)
A. V. Pisliakov, Kurchatov Institute (Russian Federation)
N. P. Zaretskiy, Kurchatov Institute (Russian Federation)
N. N. Samotaev, Kurchatov Institute (Russian Federation)
A. V. Sokolov, Kurchatov Institute (Russian Federation)

Published in SPIE Proceedings Vol. 8066:
Smart Sensors, Actuators, and MEMS V
Ulrich Schmid; José Luis Sánchez-Rojas; Monika Leester-Schaedel, Editor(s)

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