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Proceedings Paper

Laser-induced local transfer of glass-ceramic materials
Author(s): V. U. Kasatkin; E. A. Shakhno
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Paper Abstract

Nowadays there is tendency to search new materials which have specific properties in various fields of practical applications including microelectronics and optoelectronics. These materials can be applied for fabrication of new type of devices. Fabrication of glass-ceramic films by method of laser-induced local transfer is interesting purpose. Glass-ceramic films can be applied for forming of micro-optic elements, elements of microelectronic and optoelectronic circuits. Process of laser-induced local transfer of sitall ST-50-1 by fiber laser (λ=1,06 μm) was investigated and its features were revealed. Film coverings having properties of polycrystalline glass-ceramic films were carried out by laser-induced local transfer of material from ST-50-1 sitall donor plate to K8 glass acceptor substrate. Estimation of deposited films quality and its thickness was carried out and optical properties were investigated.

Paper Details

Date Published: 28 February 2011
PDF: 5 pages
Proc. SPIE 7996, Fundamentals of Laser-Assisted Micro- and Nanotechnologies 2010, 799608 (28 February 2011); doi: 10.1117/12.887377
Show Author Affiliations
V. U. Kasatkin, St. Petersburg State Univ. of Information Technologies, Mechanics and Optics (Russian Federation)
E. A. Shakhno, St. Petersburg State Univ. of Information Technologies, Mechanics and Optics (Russian Federation)


Published in SPIE Proceedings Vol. 7996:
Fundamentals of Laser-Assisted Micro- and Nanotechnologies 2010
Vadim P. Veiko; Tigran A. Vartanyan, Editor(s)

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