Share Email Print

Proceedings Paper

Multilayer white beam study
Author(s): K. Friedrich; Ch. Morawe; J.-Ch. Peffen; M. Osterhoff
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The degradation mechanisms are a critical issue if multilayers are used as monochromators for white beam synchrotron applications. To quantify the radiation impact x-ray reflectivity measurements before, during, and after white beam exposure were performed. For the in-situ irradiation study a versatile vacuum chamber was developed and tested using a high power undulator source. The device is equipped with a cooling system for the multilayer samples to distinguish thermal effects from pure radiation induced ones. The x-ray reflectivity was measured at fixed angle of incidence in an energy dispersive mode and as a function of time. The energy dispersive detection allows for the simultaneous observation of the multilayer reflectivity spectrum over a wide range. The white beam study includes various long-term exposures with an incoming load up to 250 W. Ex-situ x-ray reflectivity measurements and beam imaging were carried out with monochromatic radiation at 8 keV before and after the white beam exposure. TEM analysis provides complementary information on the layer structure in the stack. Depending on the material system, the total radiation dose, and the sample environment, different degrees of modifications in the multilayer structure were observed.

Paper Details

Date Published: 18 May 2011
PDF: 8 pages
Proc. SPIE 8077, Damage to VUV, EUV, and X-ray Optics III, 80770M (18 May 2011); doi: 10.1117/12.887000
Show Author Affiliations
K. Friedrich, European Synchrotron Radiation Facility (France)
Ch. Morawe, European Synchrotron Radiation Facility (France)
J.-Ch. Peffen, European Synchrotron Radiation Facility (France)
M. Osterhoff, European Synchrotron Radiation Facility (France)

Published in SPIE Proceedings Vol. 8077:
Damage to VUV, EUV, and X-ray Optics III
Libor Juha; Saša Bajt; Richard A. London, Editor(s)

© SPIE. Terms of Use
Back to Top