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Proceedings Paper

Piezoelectric AlN-actuated micro-tuning forks for sensing applications
Author(s): M. Gil; T. Manzaneque; J. Hernando-García; A. Ababneh; H. Seidel; J. L. Sánchez-Rojas
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Paper Abstract

In this work, we present a detailed study of the first vibration modes of a micro-tuning fork electrically actuated by means of a differential electrode lying on a piezoelectric AlN layer. The actuation through a differential electrode allows the optimal excitation of the modes of interest, including in-plane modes. Lateral and perpendicular displacements have been measured for a complete characterization of the resonator. Promising results have been obtained, including high values of the quality factor, which reach values above 4300 in air for the anti-phase in-plane modes.

Paper Details

Date Published: 5 May 2011
PDF: 9 pages
Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 80661I (5 May 2011); doi: 10.1117/12.886997
Show Author Affiliations
M. Gil, Univ. de Castilla-La Mancha (Spain)
T. Manzaneque, Univ. de Castilla-La Mancha (Spain)
J. Hernando-García, Univ. de Castilla-La Mancha (Spain)
A. Ababneh, Yarmouk Univ. (Jordan)
H. Seidel, Saarland Univ. (Germany)
J. L. Sánchez-Rojas, Univ. de Castilla-La Mancha (Spain)

Published in SPIE Proceedings Vol. 8066:
Smart Sensors, Actuators, and MEMS V
Ulrich Schmid; José Luis Sánchez-Rojas; Monika Leester-Schaedel, Editor(s)

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