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Proceedings Paper

Characterization of the first in-plane mode of AlN-actuated microcantilevers
Author(s): V. Ruiz; J. Hernando-García; A. Ababneh; H. Seidel; U. Schmid; J. K. Gimzewski; J. L. Sánchez Rojas
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Paper Abstract

The characterization of the first in-plane mode of AlN-actuated piezoelectric microcantilevers was done using different techniques. The top electrode of the cantilever was designed to allow for an efficient electrical actuation of these in-plane modes. The detection of the electrically induced in-plane movement was performed optically with the help of a stroboscopic microscope and electrically by means of an impedance analyzer. The quality factor and the resonant frequencies of the in-plane modes were estimated from the above techniques. Our results show quality factor values as high as 3000 for the first in-plane mode in air.

Paper Details

Date Published: 5 May 2011
PDF: 7 pages
Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 80661G (5 May 2011); doi: 10.1117/12.886981
Show Author Affiliations
V. Ruiz, Univ. de Castilla-La Mancha (Spain)
J. Hernando-García, Univ. de Castilla-La Mancha (Spain)
A. Ababneh, Yarmouk Univ. (Jordan)
H. Seidel, Univ. des Saarlandes (Germany)
U. Schmid, Vienna Univ. of Technology (Austria)
J. K. Gimzewski, Univ. of California, Los Angeles (United States)
J. L. Sánchez Rojas, Univ. de Castilla-La Mancha (Spain)

Published in SPIE Proceedings Vol. 8066:
Smart Sensors, Actuators, and MEMS V
Ulrich Schmid; José Luis Sánchez-Rojas; Monika Leester-Schaedel, Editor(s)

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