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Fabrication and characterization of wavelength selective microbolometers using a planar self-aligned process for low deformation membranes
Author(s): Jong Yeon Park; Joo-Yun Jung; Dean P. Neikirk; Aniruddha S. Weling; Will Hafer; James H. Goldie; Paul D. Willson
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Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, ; doi: 10.1117/12.886941
Show Author Affiliations
Jong Yeon Park, The Univ. of Texas at Austin (United States)
Joo-Yun Jung, The Univ. of Texas at Austin (United States)
Dean P. Neikirk, The Univ. of Texas at Austin (United States)
Aniruddha S. Weling, Foster-Miller, Inc. (United States)
Will Hafer, Infoscitex Corp. (United States)
James H. Goldie, Infoscitex Corp. (United States)
Paul D. Willson, U.S. Army Armament Research, Development and Engineering Ctr. (United States)


Published in SPIE Proceedings Vol. 8066:
Smart Sensors, Actuators, and MEMS V
Ulrich Schmid; José Luis Sánchez-Rojas; Monika Leester-Schaedel, Editor(s)

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