The mechanical properties of two aluminium thin films manufactured by two different laboratories were investigated using in-plane uniaxial tensile stress. The geometrical parameters, in particular film thickness, were accurately measured and their influences on the mechanical properties were analyzed. The specimens provided by each supplier show significant differences of their mechanical properties. In the same way, annealing was performed on a specific set of specimens and its influence on the mechanical properties is highlighted and discussed.

Date Published: 5 May 2011
PDF: 8 pages
Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 806609 (5 May 2011); doi: 10.1117/12.886879

Published in SPIE Proceedings Vol. 8066:
Smart Sensors, Actuators, and MEMS V
Ulrich Schmid; José Luis Sánchez-Rojas; Monika Leester-Schaedel, Editor(s)