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Proceedings Paper

Multilayer coatings for the far and extreme ultraviolet
Author(s): Juan I. Larruquert; Manuela Vidal-Dasilva; Sergio García-Cortés; Luis Rodríguez-de Marcos; Mónica Fernández-Perea; José A. Aznárez; José A. Méndez
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Paper Abstract

We present the development of novel coatings for the far and extreme ultraviolet (FUV-EUV). In the EUV above ~50 nm, the strong absorption of materials has precluded the development of narrowband coatings. An extensive research has been performed on the search and characterization of new materials with low absorption; the lanthanide series has been found to be a source of materials with relatively low absorption in the range of interest. The discovery of a wealth of materials with relatively low EUV absorption is basic to develop efficient multilayers, particularly with narrowband properties. In this way, we have developed multilayers based on Yb, Al, and SiO with narrowband performance in the 50-92 nm range; these are first narrowband coatings peaked above 70 nm. Our recent research on multilayers based on Eu, Al, and SiO provide promising results, with an increase in the peak reflectance versus Yb/Al/SiO multilayers, along with a peak wavelength that can be extended up to ~100 nm. For applications where FUV-EUV narrowband coatings have not been able to be prepared, we can design multilayers that address specific purposes, such as maximizing the reflectance ratio at two wavelengths or bands. Our first goal in this direction is the development of coatings with high 102.6 nm/ 121.6 nm reflectance ratio. Calculations predict that a high reflectance at Lyman β with a good rejection at Lyman α can be obtained through multilayer coatings. We are at the beginning of experimental research for this goal.

Paper Details

Date Published: 4 May 2011
PDF: 8 pages
Proc. SPIE 8076, EUV and X-Ray Optics: Synergy between Laboratory and Space II, 80760D (4 May 2011); doi: 10.1117/12.886856
Show Author Affiliations
Juan I. Larruquert, Consejo Superior de Investigaciones Científicas (Spain)
Manuela Vidal-Dasilva, Consejo Superior de Investigaciones Científicas (Spain)
Sergio García-Cortés, Consejo Superior de Investigaciones Científicas (Spain)
Luis Rodríguez-de Marcos, Consejo Superior de Investigaciones Científicas (Spain)
Mónica Fernández-Perea, Consejo Superior de Investigaciones Científicas (Spain)
José A. Aznárez, Consejo Superior de Investigaciones Científicas (Spain)
José A. Méndez, Consejo Superior de Investigaciones Científicas (Spain)


Published in SPIE Proceedings Vol. 8076:
EUV and X-Ray Optics: Synergy between Laboratory and Space II
René Hudec; Ladislav Pina, Editor(s)

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