Share Email Print
cover

Proceedings Paper

Thickness control of a thin film after drying through thermal and evaporative management in drying process of a polymer solution coated on a flat substrate: application of the dynamical model of the drying process
Author(s): Hiroyuki Kagami; Hiroshi Kubota
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

We have proposed and modified a model of drying process of polymer solution coated on a flat substrate for flat polymer film fabrication supposing resist coating process in semiconductor engineering process and so on. And we have clarified dependence of distribution of polymer molecules on a flat substrate on a various parameters based on analysis of many numerical simulations of the model. Then we applied the model to thickness control of a thin film after drying through thermal management. But minute thickness control of a thin film after drying was not enough and more minute thickness control of it was desired. Therefore, in this study, we add evaporative management for more minute thickness control of a thin film after drying. As a result, thickness control of a thin film after drying in drying process of a polymer solution coated on a flat substrate can be improved further through adding evaporative operations to thermal operations artificially and instantaneously depending on solute's distribution during drying.

Paper Details

Date Published: 3 May 2011
PDF: 6 pages
Proc. SPIE 8068, Bioelectronics, Biomedical, and Bioinspired Systems V; and Nanotechnology V, 806813 (3 May 2011); doi: 10.1117/12.886827
Show Author Affiliations
Hiroyuki Kagami, Nagoya College (Japan)
Hiroshi Kubota, Kumamoto Univ. (Japan)


Published in SPIE Proceedings Vol. 8068:
Bioelectronics, Biomedical, and Bioinspired Systems V; and Nanotechnology V
Ángel B. Rodríguez-Vázquez; Rainer Adelung, Editor(s)

© SPIE. Terms of Use
Back to Top