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Proceedings Paper

Integrated microsystems based on intrinsically active polymers
Author(s): Andreas Richter; Stephan Klatt; Rinaldo Greiner; Georgi Paschew; Merle Allerdissen; Willy Haas
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Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 80662D; doi: 10.1117/12.886770
Show Author Affiliations
Andreas Richter, Technische Univ. Dresden (Germany)
Stephan Klatt, Technische Univ. Dresden (Germany)
Rinaldo Greiner, Technische Univ. Dresden (Germany)
Georgi Paschew, Technische Univ. Dresden (Germany)
Merle Allerdissen, Technische Univ. Dresden (Germany)
Willy Haas, Technische Univ. Dresden (Germany)


Published in SPIE Proceedings Vol. 8066:
Smart Sensors, Actuators, and MEMS V
Ulrich Schmid; José Luis Sánchez-Rojas; Monika Leester-Schaedel, Editor(s)

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