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Proceedings Paper

Thermal stability on Mo/B[sub]4[/sub]C multilayers
Author(s): Miriam Barthelmess; Saša Bajt
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Paper Abstract

Temperature stability of Mo/B4C multilayers with normal incidence peak reflectivity at 7 nm was investigated in a temperature range between 100°C and 900°C. With this multilayer pair we achieved up to 24% reflectivity in the asdeposited state at 6.7 nm. We investigated the effect of post-deposition annealing temperature and time on intrinsic stress, period and normal incidence reflectivity. We observed that stress alters almost linearly with temperature up to 600°C. In this temperature range the multilayer period expands by <1%. The major change in stress and period occurs in the first minutes of heat treatment. The stress relaxation is accompanied with volume and packing density increase (period expansion). This process, which happens within minutes, is followed by a diffusion controlled process.

Paper Details

Date Published: 18 May 2011
PDF: 11 pages
Proc. SPIE 8077, Damage to VUV, EUV, and X-ray Optics III, 807710 (18 May 2011); doi: 10.1117/12.886751
Show Author Affiliations
Miriam Barthelmess, Deutsches Elektronen-Synchrotron (Germany)
Saša Bajt, Deutsches Elektronen-Synchrotron (Germany)


Published in SPIE Proceedings Vol. 8077:
Damage to VUV, EUV, and X-ray Optics III
Libor Juha; Saša Bajt; Richard A. London, Editor(s)

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