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Proceedings Paper

Airborne particle generation for optical tweezers by thermo-mechanical membrane actuators
Author(s): T. Polster; S. Leopold; M. Hoffmann
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Paper Abstract

This article presents a new approach for airborne particle generation for optical tweezers. The used element is a 500 nm thin aluminum nitride membrane with an integrated heating element. Thus the membrane works as thermo-mechanical actor. The membrane device is characterized concerning their mechanical and thermal behavior. Successful airborne particle generation is demonstrated with 10 μm silicon dioxide spheres. They are lifted up some 10th of μm from the membrane surface. The development and test of this device serves as starting point for experiments with optical tweezers in air.

Paper Details

Date Published: 5 May 2011
PDF: 7 pages
Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 80661F (5 May 2011); doi: 10.1117/12.886727
Show Author Affiliations
T. Polster, Ilmenau Univ. of Technology (Germany)
S. Leopold, Ilmenau Univ. of Technology (Germany)
M. Hoffmann, Ilmenau Univ. of Technology (Germany)


Published in SPIE Proceedings Vol. 8066:
Smart Sensors, Actuators, and MEMS V
Ulrich Schmid; José Luis Sánchez-Rojas; Monika Leester-Schaedel, Editor(s)

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