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Proceedings Paper

THz detection by modified thermopile
Author(s): Béla Szentpáli; Gábor Matyi; Péter Fürjes; Endre László; Gábor Battistig; István Bársony; Gergely Károlyi; Tibor Berceli
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Paper Abstract

The modified micromachined thermopile consists of linearly arranged thermopairs instead of the usual loops. This device can act as a series of antennas and senses the millimeter wave radiation [1]. The antenna-like operation was demonstrated by the strong dependence on the polarization. The working principle is similar to the bolometers in that respect that the absorbed radiation heats up the semiconductor strips, but the temperature increment is sensed by the Seebeck effect instead of the resistance increment. Therefore there is no read-out current and the voltage output starts from zero. In the present work we are going to search absorption spectra of the device. It is shown that the resonance depends mainly on the dimensions and shape of the chip; the linear thermopiles are rather E-field probes. The fabrication of the device will be also outlined as well as the experimental results.

Paper Details

Date Published: 5 May 2011
PDF: 6 pages
Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 80661R (5 May 2011); doi: 10.1117/12.886707
Show Author Affiliations
Béla Szentpáli, Research Institute for Technical Physics and Materials Science (Hungary)
Gábor Matyi, EnerSys Advanced Systems (Hungary)
Péter Fürjes, Research Institute for Technical Physics and Materials Science (Hungary)
Endre László, Research Institute for Technical Physics and Materials Science (Hungary)
Gábor Battistig, Research Institute for Technical Physics and Materials Science (Hungary)
István Bársony, Research Institute for Technical Physics and Materials Science (Hungary)
Gergely Károlyi, Budapest Univ. of Technology and Economics (Hungary)
Tibor Berceli, Budapest Univ. of Technology and Economics (Hungary)


Published in SPIE Proceedings Vol. 8066:
Smart Sensors, Actuators, and MEMS V
Ulrich Schmid; José Luis Sánchez-Rojas; Monika Leester-Schaedel, Editor(s)

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