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Proceedings Paper

Fabrication of low loss coplanar waveguides on gold-doped Czochralski-silicon
Author(s): A. Abuelgasim; Kanad Mallik; P. Ashburn; C. H. De Groot
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Paper Abstract

Coplanar waveguides fabricated on gold-doped Czochralski-silicon show reduced losses. Gold atoms implanted into silicon substrates compensate for background free carriers introduced by impurities in the material. This leads to an increased silicon resistivity which exhibits lower microwave absorption. High frequency measurements in 1-40 GHz range of coplanar waveguides fabricated on gold-doped silicon show attenuation reductions up to 70%, highlighting the benefits of deep level compensation of shallow level impurities in silicon using gold.

Paper Details

Date Published: 3 May 2011
PDF: 12 pages
Proc. SPIE 8068, Bioelectronics, Biomedical, and Bioinspired Systems V; and Nanotechnology V, 806811 (3 May 2011); doi: 10.1117/12.886552
Show Author Affiliations
A. Abuelgasim, Univ. of Southampton (United Kingdom)
Kanad Mallik, Univ. of Southampton (United Kingdom)
P. Ashburn, Univ. of Southampton (United Kingdom)
C. H. De Groot, Univ. of Southampton (United Kingdom)

Published in SPIE Proceedings Vol. 8068:
Bioelectronics, Biomedical, and Bioinspired Systems V; and Nanotechnology V
Ángel B. Rodríguez-Vázquez; Rainer Adelung, Editor(s)

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