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Proceedings Paper

Development of a new technological MEMS process for AC voltage standards
Author(s): F. Blard; A. Bounouh; D. Bélières; S. Charlot; D. Bourrier; H. Camon
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Paper Abstract

This paper describes the development of a new technological process for manufacturing MEMS with out-of-plane motion in order to develop voltage references with high stability (deviation from the nominal value less than some 10-6per year) and working in alternating current (AC). In this application, the AC voltage reference is defined at the pull-in point of the MEMS variable capacitor made of two electrodes, one fixed and the other movable driven by an AC current having a frequency much higher than the mechanical resonant frequency. This process has been developed to get MEMS devices exhibiting high nominal capacitances, which makes the development of the read-out electronics easier, and metallized electrodes to avoid charge effects on the stability of the voltage standard. Moreover, this process allows to realize stoppers, in order to get a good operational reliability.

Paper Details

Date Published: 5 May 2011
PDF: 6 pages
Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 80662K (5 May 2011); doi: 10.1117/12.886394
Show Author Affiliations
F. Blard, Lab. National de Métrologie et d'Essais (France)
Lab. d'Analyse et d'Architecture des Systèmes, CNRS (France)
Univ. of Toulouse (France)
A. Bounouh, Lab. National de Métrologie et d'Essais (France)
D. Bélières, Lab. National de Métrologie et d'Essais (France)
S. Charlot, Lab. d'Analyse et d'Architecture des Systèmes, CNRS (France)
Univ. of Toulouse (France)
D. Bourrier, Lab. d'Analyse et d'Architecture des Systèmes, CNRS (France)
Univ. of Toulouse (France)
H. Camon, Lab. d'Analyse et d'Architecture des Systèmes, CNRS (France)
Univ. of Toulouse (France)


Published in SPIE Proceedings Vol. 8066:
Smart Sensors, Actuators, and MEMS V
Ulrich Schmid; José Luis Sánchez-Rojas; Monika Leester-Schaedel, Editor(s)

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