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Proceedings Paper

A novel MEMS design of a piezoelectric generator for fluid-actuated energy conversion
Author(s): Ingo Kuehne; Matthias Schreiter; Julian Seidel; Helmut Seidel; Alexander Frey
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Paper Abstract

In this paper a novel MEMS design of a piezoelectric generator for fluid-actuated energy conversion is presented. An exemplary energy scavenging scenarios is introduced. Moreover, the electro-mechanical properties of different piezoelectric thin films (PZT, AlN, ZnO) are introduced and compared to each other. Depending on the specific load scenario optimum piezoelectric cantilever shapes are investigated. A point load at the free-end of a cantilever requires a triangular cantilever shape. Compared to a classical rectangular shape the electrical area energy density is three times larger. A maximum area energy density value of 35 nJ/mm2 is measured for the triangular cantilever shapes. A uniform load as occurring for fluid-actuated energy harvesting calls for a triangular-curved cantilever shape and is also superior to classical geometries.

Paper Details

Date Published: 5 May 2011
PDF: 8 pages
Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 806617 (5 May 2011); doi: 10.1117/12.886367
Show Author Affiliations
Ingo Kuehne, Siemens AG (Germany)
Matthias Schreiter, Siemens AG (Germany)
Julian Seidel, Munich Univ. of Applied Sciences (Germany)
Helmut Seidel, Saarland Univ. (Germany)
Alexander Frey, Siemens AG (Germany)


Published in SPIE Proceedings Vol. 8066:
Smart Sensors, Actuators, and MEMS V
Ulrich Schmid; José Luis Sánchez-Rojas; Monika Leester-Schaedel, Editor(s)

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