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Proceedings Paper

High-sensitivity temperature sensing by employing an on-chip high-Q PDMS-coated toroidal microcavity
Author(s): Bei-Bei Li; Qing-Yan Wang; Xue-Feng Jiang; Qihuang Gong; Yun-Feng Xiao
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Paper Abstract

A high-sensitivity temperature sensor is demonstrated by coating a layer of polydimethylsiloxane (PDMS) on the surface of a silica toroidal microresonator on a silicon chip. Combining both the advantages of the WGM microcavity (with ultrahigh Q factor) and PDMS (with large thermal effect), the PDMS-coated microresonator is highly sensitive to the temperature change of the surroundings. We find that, when the PDMS layer becomes thicker, the fundamental WGM experiences a transition from red- to blue-shift with temperature increasing due to the negative thermal-optic coefficient of PDMS. The measured sensitivity (0.151 nm/K) is one order of magnitude higher than pure silica microcavity sensors. The ultra-high resolution of the temperature sensor is also analyzed to reach 10-4 K. With both high sensitivity and resolution, the thermal sensor can be employed to monitor a slight temperature variation which cannot be realized with conventional temperature sensor. Its on-chip feature can also fulfill the demand for integration and miniaturization in optics.

Paper Details

Date Published: 16 May 2011
PDF: 7 pages
Proc. SPIE 8034, Photonic Microdevices/Microstructures for Sensing III, 80340J (16 May 2011); doi: 10.1117/12.886258
Show Author Affiliations
Bei-Bei Li, Peking Univ. (China)
Qing-Yan Wang, Peking Univ. (China)
Xue-Feng Jiang, Peking Univ. (China)
Qihuang Gong, Peking Univ. (China)
Yun-Feng Xiao, Peking Univ. (China)

Published in SPIE Proceedings Vol. 8034:
Photonic Microdevices/Microstructures for Sensing III
Hai Xiao; Xudong Fan; Anbo Wang, Editor(s)

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