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Proceedings Paper

Metrological AFMs and its application for versatile nano-dimensional metrology tasks
Author(s): Gaoliang Dai; T. Dziomba; F. Pohlenz; H.-U. Danzebrink; L. Koenders
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Paper Abstract

Traceable calibrations of various micro and nano measurement devices are crucial tasks for ensuring reliable measurements for micro and nanotechnology. Today metrological AFM are widely used for traceable calibrations of nano dimensional standards. In this paper, we introduced the developments of metrological force microscopes at PTB. Of the three metrological AFMs described here, one is capable of measuring in a volume of 25 mm x 25 mm x 5 mm. All instruments feature interferometers and the three-dimensional position measurements are thus directly traceable to the metre definition. Some calibration examples on, for instance, flatness standards, step height standards, one and two dimensional gratings are demonstrated.

Paper Details

Date Published: 31 December 2010
PDF: 8 pages
Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 754446 (31 December 2010); doi: 10.1117/12.886192
Show Author Affiliations
Gaoliang Dai, Physikalisch-Technische Bundesanstalt (Germany)
T. Dziomba, Physikalisch-Technische Bundesanstalt (Germany)
F. Pohlenz, Physikalisch-Technische Bundesanstalt (Germany)
H.-U. Danzebrink, Physikalisch-Technische Bundesanstalt (Germany)
L. Koenders, Physikalisch-Technische Bundesanstalt (Germany)

Published in SPIE Proceedings Vol. 7544:
Sixth International Symposium on Precision Engineering Measurements and Instrumentation
Jiubin Tan; Xianfang Wen, Editor(s)

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