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Proceedings Paper

Optical characterisation of RF sputter coated palladium thin films for hydrogen sensing
Author(s): Richard M Carter; Peter Morrall; Robert R. J. Maier; Benjamin J. S. Jones; Scott McCulloch; James S. Barton
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Paper Abstract

We investigate the optical properties of Pd thin films of the thickness 20-100nm deposited on Si wafer via RF sputter coating. The Pd samples are characterised using white light interfermometry for thickness and ellipsometry for refractive index. We demonstrate the independence of refractive index on film thickness above 20nm. Considerable discrepancy is found between our measurement and previously published complex refractive indices for both bulk and RF sputter coated Pd, indicating a high degree of dependence on deposition technique.

Paper Details

Date Published: 17 May 2011
PDF: 4 pages
Proc. SPIE 7753, 21st International Conference on Optical Fiber Sensors, 77535T (17 May 2011); doi: 10.1117/12.886057
Show Author Affiliations
Richard M Carter, Heriot-Watt Univ. (United Kingdom)
Peter Morrall, AWE plc. (United Kingdom)
Robert R. J. Maier, Heriot-Watt Univ. (United Kingdom)
Benjamin J. S. Jones, AWE plc. (United Kingdom)
Scott McCulloch, AWE plc. (United Kingdom)
James S. Barton, Heriot-Watt Univ. (United Kingdom)


Published in SPIE Proceedings Vol. 7753:
21st International Conference on Optical Fiber Sensors

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