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Proceedings Paper

Polarization phase-shifting interference microscopy for ultra-precision surface topography
Author(s): W. Cheng; X. Chen; L. Zhou; X. Liu
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Paper Abstract

Phase-shifting interference microscopy is a very important technique for precision surface topography measurement. In this paper, polarization phase-shifting interference microscopy is proposed for ultra-precision surface topography measurement. The principle of the microscopy is described and analyzed in details, a system based on the principle is constructed, and series of experimental testing are conducted on the system. The experimental results show that the measurement accuracy is better than 1.5nm, and high accuracy is verified.

Paper Details

Date Published: 29 December 2010
PDF: 8 pages
Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 75442H (29 December 2010); doi: 10.1117/12.885971
Show Author Affiliations
W. Cheng, Huazhong Univ. of Science and Technology (China)
X. Chen, Huazhong Univ. of Science and Technology (China)
L. Zhou, Huazhong Univ. of Science and Technology (China)
X. Liu, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 7544:
Sixth International Symposium on Precision Engineering Measurements and Instrumentation
Jiubin Tan; Xianfang Wen, Editor(s)

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