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Proceedings Paper

Temperature-frequency characteristics of silicon micro-cantilever and measurement techniques in high temperature environment
Author(s): Dongsheng She; Xiagdong Wang; Xiwen Zhang; Liding Wang
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Paper Abstract

In order to study the dynamic characteristics of silicon micro-cantilever in high temperature environment, the relationship between the first-order resonance frequency of micro-cantilever and the environment temperature was theoretically analyzed. The dynamic measurement equipment was developed for the MEMS microstructure in the high temperature environment. Both the base excitation with PZT and the electrical discharge excitation method were adopted to excite the micro-cantilever under test. The impulse response signal of the microstructure can be obtained using the Laser Doppler Vibrometer. The temperature-frequency characteristics of silicon micro-cantilever has been experimentally studied. Test results show that the resonance frequency of silicon micro-cantilever slightly decreases with the increasing temperature, and it is almost a linear dependence between the change in temperature and the change in resonance frequency, which is consistent with the result of theoretical analysis.

Paper Details

Date Published: 31 December 2010
PDF: 7 pages
Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 754468 (31 December 2010); doi: 10.1117/12.885680
Show Author Affiliations
Dongsheng She, Dalian Univ. of Technology (China)
Xiagdong Wang, Dalian Univ. of Technology (China)
Xiwen Zhang, Dalian Univ. of Technology (China)
Liding Wang, Dalian Univ. of Technology (China)


Published in SPIE Proceedings Vol. 7544:
Sixth International Symposium on Precision Engineering Measurements and Instrumentation
Jiubin Tan; Xianfang Wen, Editor(s)

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