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Proceedings Paper

A 2D coplanar translation stage with synchronous XY position metrology for surface scanning measurement
Author(s): Kaiyi Xian; Liping Zhou; Xiaojun Liu
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Paper Abstract

A precise translation stage is important for surface topography measurement based on scanning method, for it provides precise measurement datum and accurate positioning of scanning points. In this paper, a 2-D coplanar translation stage with synchronous XY position metrology is developed for surface scanning measurement. The mechanical structure of this stage is designed to translate along X and Y directions based on a common plane, which improves the movement flatness of the sample table. For higher precise 2-D positioning metrology, a novel double cross diffraction grating measurement system is proposed, by which the XY position of the sample table can be measured synchronously.

Paper Details

Date Published: 28 December 2010
PDF: 7 pages
Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 75441L (28 December 2010); doi: 10.1117/12.885663
Show Author Affiliations
Kaiyi Xian, Huazhong Univ. of Science and Technology (China)
Liping Zhou, Huazhong Univ. of Science and Technology (China)
Xiaojun Liu, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 7544:
Sixth International Symposium on Precision Engineering Measurements and Instrumentation

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