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Proceedings Paper

Development of 3D touch trigger probe with real-time observation
Author(s): Chih-Liang Chu; Cheng-Yu Wu
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Paper Abstract

This study aims at inventing a low-price but high-precision 3D touch trigger probe (or a CMM probe). The tip ball of the stylus, with a diameter smaller than 100 μm, is made by a micro electro discharge machine and wire electro discharge grinding. The stylus is mounted at the centre of a stiff cross-form frame, which in turn is suspended on four micro beams. As proven by several experiments, this structure restricts the degrees of freedom on three directions. The displacement sensor and 2D angle sensor is performed using modified commercial DVD pickup heads to measure the three degrees of motional freedom on the suspension structure. As for application, since the tip ball is difficult to identify by naked eye, we use modified commercial webcam and microscope to create a micro imaging system. This imaging system has been tested to have 2.8mmx2.1mm field of view, and 1.5mm depth of field.

Paper Details

Date Published: 28 December 2010
PDF: 7 pages
Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 75446G (28 December 2010); doi: 10.1117/12.885593
Show Author Affiliations
Chih-Liang Chu, Southern Taiwan Univ. (Taiwan)
Cheng-Yu Wu, Southern Taiwan Univ. (Taiwan)

Published in SPIE Proceedings Vol. 7544:
Sixth International Symposium on Precision Engineering Measurements and Instrumentation
Jiubin Tan; Xianfang Wen, Editor(s)

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