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Proceedings Paper

Capacitive lamb wave transducers with multiple even-modes for biochemical detections
Author(s): Li-Feng Ge; Jin-Ping Shao
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Paper Abstract

The high-order even-modes of high-aspect-ratio rectangular diaphragms are further exploited in this paper to excite Lamb waves. Thus the capacitive Lamb wave transducer (CLWT) can be excited by not only the second-order mode but also higher order even-modes, so that we can obtain higher operation frequencies, and make the CLWTs operate at several different frequencies for different applications. An optimized design with a 3μm thick silicon plate and submicrometer thick conducting silicon diaphragms is given according to the characteristics of the lowest order Lamb wave (i.e. A0 wave) and the TDK model for capacitive micromachined ultrasonic transducers (CMUT) with high-aspect-ratio rectangular diaphragms. Such a CLWT with multiple even-modes is significant and attractive for gas and liquid sensing in the field of biochemical measurements.

Paper Details

Date Published: 28 December 2010
PDF: 6 pages
Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 75442U (28 December 2010); doi: 10.1117/12.885567
Show Author Affiliations
Li-Feng Ge, Anhui Univ. (China)
Jin-Ping Shao, Anhui Univ. (China)


Published in SPIE Proceedings Vol. 7544:
Sixth International Symposium on Precision Engineering Measurements and Instrumentation
Jiubin Tan; Xianfang Wen, Editor(s)

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