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Proceedings Paper

Nano-radian resolution gradient integrated surface profiler: a new compact measurement instrumentation
Author(s): Yasuo Higashi; Xia-Wei Zhang; Tatsuya Kume; Kazuhiro Enami; Katsuyoshi Endo; Junichi Uchikoshi
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Proc. SPIE TD07, Optifab 2011: Technical Digest, ; doi: 10.1117/12.885459
Show Author Affiliations
Yasuo Higashi, High Energy Accelerator Research Organization (Japan)
Xia-Wei Zhang, High Energy Accelerator Research Organization (Japan)
Tatsuya Kume, High Energy Accelerator Research Organization (Japan)
Kazuhiro Enami, High Energy Accelerator Research Organization (Japan)
Katsuyoshi Endo, Osaka Univ. (Japan)
Junichi Uchikoshi, Osaka Univ. (Japan)


Published in SPIE Proceedings Vol. TD07:
Optifab 2011: Technical Digest
Matthias Pfaff; Jay Kumler, Editor(s)

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