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Proceedings Paper

Design of co-path scanning long trace profiler for measurement of x-ray space optical elements
Author(s): Li Shun; Gong Yan; Zhang Wei; Zhao Yang
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Paper Abstract

The Long Trace Profiler (LTP) is a precision surface slope error measurement instrument used in synchrotron radiation optics for many years. By making some modifications to the LTP system, we developed a co-path scanning LTP (CSLTP) system to test the cylindrical aspherical surface which used in X-ray space optics. To reduce the mistake caused by air turbulence and manufacture faults of optical elements used, the CSLTP is designed with the least difference between the testing beam path and the reference beam path. Also, it uses multiple-beam interference but double beam interference to reduce the width of beam fringe. This improves the position precision of the beam fringe on the image plane.

Paper Details

Date Published: 28 December 2010
PDF: 7 pages
Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 754421 (28 December 2010); doi: 10.1117/12.885415
Show Author Affiliations
Li Shun, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Graduate School of the Chinese Academy of Sciences (China)
Gong Yan, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Zhang Wei, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Zhao Yang, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Graduate School of the Chinese Academy of Sciences (China)


Published in SPIE Proceedings Vol. 7544:
Sixth International Symposium on Precision Engineering Measurements and Instrumentation
Jiubin Tan; Xianfang Wen, Editor(s)

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