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Proceedings Paper

LDGI signal subdivision by soft computing for nanomeasurement
Author(s): Kuang-Chao Fan; Fang Cheng
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Paper Abstract

A high-precision optical scale called LDGI (Linear Diffraction Grating Interferometer) has been developed for long stroke measurement to nanometer accuracy. This study presents the principle of newly developed LDGI and its possible waveform errors of output signals. Mathematical methods for waveform error correction, pulse counting, signal subdivision and displacement calculation are proposed. All the digital processes are carried out by software. Experimental results show that the system has high tolerance to geometrical errors of the moving stage. The standard deviation of measured values is within 20nm even up to 18mm long stroke.

Paper Details

Date Published: 28 December 2010
PDF: 7 pages
Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 75440I (28 December 2010); doi: 10.1117/12.885413
Show Author Affiliations
Kuang-Chao Fan, Hefei Univ. of Technology (China)
National Taiwan Univ. (Taiwan)
Fang Cheng, Hefei Univ. of Technology (China)


Published in SPIE Proceedings Vol. 7544:
Sixth International Symposium on Precision Engineering Measurements and Instrumentation

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