Share Email Print
cover

Proceedings Paper

Feasibility and challenge for measurement of transparent object by adopting differential interference contrast technology
Author(s): Sheng-Kang Yu; Ting-Kun Liu; Chun-Chia Liu; Wei-Lun Chen; Shih-Chieh Lin
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The Differential Interference Contrast approach (DIC) which is frequently used for image enhancement to increase the contrast between transparent object and its background is adopted for the dimensional measurement of a transparent structure. With the phase difference image retrieved using the DIC technique, the phase map of the examined object can be approximated by integrating the phase difference. Experimental results show the feasibility of using the transmitted DIC for transparent object measurement. The results show that the height of a transparent structure measured using the DIC method is quite close to those measured using AFM while those measured using the white light interference method results in much larger measurement than all others. However, when a structure is no longer a simple geometry, adopting this method directly might results in wrong results. In this paper, we would like to present the work had been done, discuss the challenge ahead, and possible approach can be adopted.

Paper Details

Date Published: 28 December 2010
PDF: 7 pages
Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 75440L (28 December 2010); doi: 10.1117/12.885401
Show Author Affiliations
Sheng-Kang Yu, National Tsing Hua Univ. (Taiwan)
Ting-Kun Liu, Industrial Technology Research Institute (Taiwan)
Chun-Chia Liu, National Tsing Hua Univ. (Taiwan)
Wei-Lun Chen, National Tsing Hua Univ. (Taiwan)
Shih-Chieh Lin, National Tsing Hua Univ. (Taiwan)


Published in SPIE Proceedings Vol. 7544:
Sixth International Symposium on Precision Engineering Measurements and Instrumentation
Jiubin Tan; Xianfang Wen, Editor(s)

© SPIE. Terms of Use
Back to Top