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Proceedings Paper

Fine correction of nonlinearity in homodyne interferometry
Author(s): Peng-cheng Hu; Florian Pollinger; Karl Meiners-Hagen; Hong-xing Yang; Ahmed Abou-Zeid
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Paper Abstract

In a typical homodyne interferometer with 4-channel detectors, the nonlinearity resulting from beam power drifting couldn't be thoroughly suppressed by Heydemann correction. This study presents an analysis of the nonlinearity resulting from beam power drifting. From a theoretical approach, the nonlinearity model before and after conventional Heydemann correction is built. And a fine correction method involving Heydemann correction with partial data is introduced. The experimental results indicate that, the proposed method suppresses the nonlinearity in a homodyne interferometer to 0.18 nm, which would be 1.49 nm with conventional Heydemann correction.

Paper Details

Date Published: 31 December 2010
PDF: 8 pages
Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 75444E (31 December 2010); doi: 10.1117/12.885392
Show Author Affiliations
Peng-cheng Hu, Harbin Institute of Technology (China)
Florian Pollinger, Physikalisch-Technische Bundesanstalt (Germany)
Karl Meiners-Hagen, Physikalisch-Technische Bundesanstalt (Germany)
Hong-xing Yang, Harbin Institute of Technology (China)
Ahmed Abou-Zeid, Physikalisch-Technische Bundesanstalt (Germany)


Published in SPIE Proceedings Vol. 7544:
Sixth International Symposium on Precision Engineering Measurements and Instrumentation
Jiubin Tan; Xianfang Wen, Editor(s)

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