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Proceedings Paper

Nonlinear control of maglev positioning stage
Author(s): Wei-Ming Wang; Shu-Yuan Ma; Wen-Qiang Wang; Dian-Chao Li
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Paper Abstract

Magnetic-levitation (maglev) positioning stage is a system with complex nonlinear, strong coupling and low damping. This research focused on the control algorithm and the effect of eddy current damper applied to the system which consists of a moving table, four Halbach permanent magnetic arrays, four stators and displacement sensors. All of the magnetic arrays are fixed to the bottom of the moving table. To avoid the occurrence of oscillation while the stage is being positioned, a permanent magnet set which served as an eddy current damper was added to the system; and it is proved through theoretical analysis that the damping force generated by the eddy current damper is proportional to the movement speed of the table. A motion control mathematical model including the segment of an eddy current damper was built, and the nonlinear controller of the system was given based on the theory of differential geometry decoupling. Simulation results show that decoupling control of movement the moving parts can be realized in horizontal and vertical directions.

Paper Details

Date Published: 28 December 2010
PDF: 8 pages
Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 75441H (28 December 2010); doi: 10.1117/12.885306
Show Author Affiliations
Wei-Ming Wang, Beijing Institute of Technology (China)
Shu-Yuan Ma, Beijing Institute of Technology (China)
Wen-Qiang Wang, Beijing Institute of Technology (China)
Dian-Chao Li, Beijing Institute of Technology (China)


Published in SPIE Proceedings Vol. 7544:
Sixth International Symposium on Precision Engineering Measurements and Instrumentation

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