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Proceedings Paper

Comparison of three TCC calculation algorithms for partially coherent imaging simulation
Author(s): Xiaofei Wu; Shiyuan Liu; Wei Liu; Tingting Zhou; Lijuan Wang
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Paper Abstract

Three kinds of TCC (transmission cross coefficient) calculation algorithms used for partially coherent imaging simulation, including the integration algorithm, the analytical algorithm, and the matrix-based fast algorithm, are reviewed for their rigorous formulations and numerical implementations. The accuracy and speed achievable using these algorithms are compared by simulations conducted on several mainstream illumination sources commonly used in current lithographic tools. Simulation results demonstrate that the integration algorithm is quite accurate but time consuming, while the matrix-based fast algorithm is efficient but its accuracy is heavily dependent on simulation resolution. The analytical algorithm is both efficient and accurate but not suitable for arbitrary optical systems. It is therefore concluded that each TCC calculation algorithm has its pros and cons with a compromise necessary to achieve a balance between accuracy and speed. The observations are useful in fast lithographic simulation for aerial image modeling, optical proximity correction (OPC), source mask optimization (SMO), and critical dimension (CD) prediction.

Paper Details

Date Published: 28 December 2010
PDF: 10 pages
Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 75440Z (28 December 2010); doi: 10.1117/12.885227
Show Author Affiliations
Xiaofei Wu, Huazhong Univ. of Science and Technology (China)
Shiyuan Liu, Huazhong Univ. of Science and Technology (China)
Wei Liu, Huazhong Univ. of Science and Technology (China)
Tingting Zhou, Huazhong Univ. of Science and Technology (China)
Lijuan Wang, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 7544:
Sixth International Symposium on Precision Engineering Measurements and Instrumentation
Jiubin Tan; Xianfang Wen, Editor(s)

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