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Proceedings Paper

Precise stage design with planar diffraction grating interferometer
Author(s): Haojie Xia; Yetai Fei
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Paper Abstract

Planar cross diffraction grating can be adopted to measure displacement as scale. In this paper, Planar grating interferometer configuration for precise displacement measurements is introduced, and the principle of interferometer based on polarization optics is deduced. According to 2-D grating interferometer structure, error sources are analyzed, and the pitch and yaw of 2-D grating guide caused by planar guide's non-linearity is the main factors to decrease the measurement system's accuracy. With grating interferometer error sources analysis, precise planar stage is proposed to integrate with the gating interferometer, the stage is compact and can minimize abbe error in structure. The methods of calibration and error compensation are employed to improve the position accuracy of the stage. As experiments show, the stage position repeatability is less than 0.1um.

Paper Details

Date Published: 28 December 2010
PDF: 5 pages
Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 754411 (28 December 2010); doi: 10.1117/12.885215
Show Author Affiliations
Haojie Xia, Hefei Univ. of Technology (China)
Yetai Fei, Hefei Univ. of Technology (China)

Published in SPIE Proceedings Vol. 7544:
Sixth International Symposium on Precision Engineering Measurements and Instrumentation
Jiubin Tan; Xianfang Wen, Editor(s)

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