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Proceedings Paper

Dynamic MEMS characterization system using differential phase measurement method
Author(s): Tong Guo; Zhichao Wu; Long Ma; Xing Fu; Xiaotang Hu
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Paper Abstract

The wide variety of shapes, functions, and operational parameters of microelectromechanical systems (MEMS) moving into production requires high flexibility for any measurement instrument. A computer-controlled stroboscopic interferometer system is described in the paper for measuring out-of-plane motions of MEMS structures with nanometer resolution. This system introduces five-step phase-shifting interferometric measurement method with high accuracy and differential measurement mode by choosing a fixed area on the device as the reference point, which eliminates the effect of random errors efficiently and improves the measurement repeatability of the system. The repeatability of 10 measurements is 3.17 nm. The study on the dynamic behavior of a micro-resonator illustrates the powerful capabilities of the system.

Paper Details

Date Published: 31 December 2010
PDF: 6 pages
Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 75444W (31 December 2010); doi: 10.1117/12.885189
Show Author Affiliations
Tong Guo, Tianjin Univ. (China)
Zhichao Wu, Tianjin Univ. (China)
Long Ma, Tianjin Univ. (China)
Xing Fu, Tianjin Univ. (China)
Xiaotang Hu, Tianjin Univ. (China)

Published in SPIE Proceedings Vol. 7544:
Sixth International Symposium on Precision Engineering Measurements and Instrumentation
Jiubin Tan; Xianfang Wen, Editor(s)

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