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Proceedings Paper

High dynamic wave front sensing for lens group characterization
Author(s): Benoit F. Wattellier; William Boucher; Sabrina Velghe; Francou Pierrick
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Paper Details

Date Published:
Proc. SPIE TD07, Optifab 2011: Technical Digest, ; doi: 10.1117/12.884977
Show Author Affiliations
Benoit F. Wattellier, PHASICS S.A. (France)
William Boucher, PHASICS S.A. (France)
Sabrina Velghe, PHASICS S.A. (France)
Francou Pierrick, PHASICS S.A. (France)

Published in SPIE Proceedings Vol. TD07:
Optifab 2011: Technical Digest
Matthias Pfaff; Jay Kumler, Editor(s)

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