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Proceedings Paper

Demonstration of microcantilever-based sensor array with integrated microfluidics
Author(s): Gregory P. Nordin; Ryan R. Anderson; Stanley J. Ness; Weisheng Hu; Timothy M. Gustafson; Jong Wook Noh; Danny C. Richards; Seunghyun Kim
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Paper Abstract

We report the integration of a nanomechanical sensor consisting of 16 silicon microcantilevers and polydimethylsiloxane (PDMS) microfluidics. With our recently developed in-plane photonic transduction method we routinely achieve microcantilever transduction responsivities in the range of 0.5-1.1 μm-1, which is comparable to the best reported for the laser reflection readout method used in atomic force microscopy (AFM). Prior work has established that differential surface stress as low as 0.23 mN/m is readily measurable with our arrays. In this paper we show biotin-streptavidin sensing with a differential surface stress of ~2.3 mN/m as a first step toward characterizing integrated microcantilever array/microfluidic sensors.

Paper Details

Date Published: 3 June 2011
PDF: 7 pages
Proc. SPIE 8018, Chemical, Biological, Radiological, Nuclear, and Explosives (CBRNE) Sensing XII, 80180X (3 June 2011); doi: 10.1117/12.884928
Show Author Affiliations
Gregory P. Nordin, Brigham Young Univ. (United States)
Ryan R. Anderson, Brigham Young Univ. (United States)
Stanley J. Ness, Brigham Young Univ. (United States)
Weisheng Hu, Brigham Young Univ. (United States)
Timothy M. Gustafson, Brigham Young Univ. (United States)
Jong Wook Noh, Brigham Young Univ. (United States)
Danny C. Richards, Brigham Young Univ. (United States)
Seunghyun Kim, Brigham Young Univ. (United States)

Published in SPIE Proceedings Vol. 8018:
Chemical, Biological, Radiological, Nuclear, and Explosives (CBRNE) Sensing XII
Augustus W. Fountain III; Patrick J. Gardner, Editor(s)

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