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Proceedings Paper

Fiber-optic Fabry-Perot interferometer tip accelerometer fabricated by laser-micromachining
Author(s): Zengling Ran; En Lu; Yunjiang Rao; Min Ni; Fei Peng; Dehong Zeng
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Paper Abstract

A novel fiber-optic tip accelerometer based on Fabry-Perot (F-P) interferometer is proposed and demonstrated, with potential to operate under high temperature, in this paper. Such a tip accelerometer is directed fabricated on a large cladding fiber end by using the 157nm laser-micromachining technology. With the calibration of a micro electro mechanical systems (MEMS) accelerometer, the sensitivity of such a fiber-optic F-P accelerometer is 1.764 rad/g. The minimum detective acceleration is estimated to be 20μg.

Paper Details

Date Published: 17 May 2011
PDF: 4 pages
Proc. SPIE 7753, 21st International Conference on Optical Fiber Sensors, 775318 (17 May 2011); doi: 10.1117/12.884922
Show Author Affiliations
Zengling Ran, Univ. of Electronic Science and Technology of China (China)
En Lu, Univ. of Electronic Science and Technology of China (China)
Yunjiang Rao, Univ. of Electronic Science and Technology of China (China)
Min Ni, Univ. of Electronic Science and Technology of China (China)
Fei Peng, Univ. of Electronic Science and Technology of China (China)
Dehong Zeng, Univ. of Electronic Science and Technology of China (China)


Published in SPIE Proceedings Vol. 7753:
21st International Conference on Optical Fiber Sensors
Jacques Albert; Wojtek J. Bock, Editor(s)

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