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Proceedings Paper

Porous silicon-based optical fiber Fabry-Perot sensor for relative humidity determination
Author(s): Guoguang Rong; Shengfei Pan; Chao Wu; Xiaobing Li; Minghong Yang
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Paper Abstract

A fiber-optic relative-humidity sensor composed of two silver coating and a thick porous silicon film is proposed and demonstrated for relative humidity sensing. The two Ag coatings are magnetically sputtered, with porous silicon membrane sandwiched in between, which constructs a low-fineness Fabry-Perot sensing head. Experimental results show that the interference fringe of the proposed porous silicon Fabry-Perot sensor shifts by 10.3 nm when relative humidity increases from 11% to 97%. The linearity of interference fringe shift to relative humidity is averagely 0.9764 below 85% RH. The proposed sensor is suitable for relative humidity sensing in the ambient environment.

Paper Details

Date Published: 17 May 2011
PDF: 4 pages
Proc. SPIE 7753, 21st International Conference on Optical Fiber Sensors, 775313 (17 May 2011); doi: 10.1117/12.884851
Show Author Affiliations
Guoguang Rong, Shanghai Jiao Tong Univ. (China)
Shengfei Pan, Shanghai Jiao Tong Univ. (China)
Chao Wu, Shanghai Jiao Tong Univ. (China)
Xiaobing Li, Wuhan Univ. of Technology (China)
Minghong Yang, Wuhan Univ. of Technology (China)


Published in SPIE Proceedings Vol. 7753:
21st International Conference on Optical Fiber Sensors
Jacques Albert; Wojtek J. Bock, Editor(s)

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