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Proceedings Paper

Through-focus scanning optical microscopy
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Paper Abstract

Through-focus scanning optical microscopy (TSOM) is another 'scanning' based method that provides threedimensional information (i.e. the size, shape and location) about micro- and nanometer-scale structures. TSOM, based on a conventional optical microscope, achieves this by acquiring and analyzing a set of optical images collected at various focus positions going through focus (from above-focus to under-focus). The measurement sensitivity is comparable to what is possible with typical light scatterometry, SEM and AFM. One of the unique characteristics of the TSOM method is its ability to separate different dimensional differences (i.e. ability to distinguish, for example, linewidth difference from line height difference), and hence is expected to reduce measurement uncertainty. TSOM holds the promise of high-throughput, through comparative measurement applications for wide variety of application areas with potentially significant savings and yield improvements.

Paper Details

Date Published: 1 June 2011
PDF: 9 pages
Proc. SPIE 8036, Scanning Microscopies 2011: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences, 803610 (1 June 2011); doi: 10.1117/12.884706
Show Author Affiliations
Ravikiran Attota, National Institute of Standards and Technology (United States)
Ronald G Dixson, National Institute of Standards and Technology (United States)
Andras E. Vladár, National Institute of Standards and Technology (United States)


Published in SPIE Proceedings Vol. 8036:
Scanning Microscopies 2011: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences
Michael T. Postek; Dale E. Newbury; S. Frank Platek; David C. Joy; Tim K. Maugel, Editor(s)

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