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Proceedings Paper

A self-protecting uncooled microbolometer structure for uncooled microbolometer
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Paper Abstract

During microbolometer operation, the detector occasionally views high temperature scenes such as the sun or flames at very close distance. The detector temperature can then increase to a level so high that the sensing material experiences an annealing effect. Accordingly, the microbolometer is required to stand high temperatures that can cause device damage. In this paper, a bimorph leg integrated microbolometer structure is proposed. The bimorph leg is an extra leg that is separated from the signal transfer legs. It is bent downward and snaps onto the substrate when the microbolometer's temperature reaches a critical temperature. The temperature of the micro-bolometer is then decreased as heat is transferred to the substrate. By snapping the bimorph leg down onto the substrate, the microbolometer's thermal conductance is temporarily increased roughly three-fold higher than that of the normal state and thermal damage to the bolometer material can be effectively prevented. The increase of thermal conductance can be controlled by changing the size of the bimorph leg.

Paper Details

Date Published: 20 May 2011
PDF: 8 pages
Proc. SPIE 8012, Infrared Technology and Applications XXXVII, 80121O (20 May 2011); doi: 10.1117/12.884432
Show Author Affiliations
Youngmin Jo, Korea Advanced Institute of Science and Technology (Korea, Republic of)
Il-Woong Kwon, Korea Advanced Institute of Science and Technology (Korea, Republic of)
Dong Soo Kim, Korea Advanced Institute of Science and Technology (Korea, Republic of)
Hyun Bin Shim, Korea Advanced Institute of Science and Technology (Korea, Republic of)
Hee Chul Lee, Korea Advanced Institute of Science and Technology (Korea, Republic of)


Published in SPIE Proceedings Vol. 8012:
Infrared Technology and Applications XXXVII
Bjørn F. Andresen; Gabor F. Fulop; Paul R. Norton, Editor(s)

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