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Proceedings Paper

Design, fabrication, and evaluation of on-chip micro-supercapacitors
Author(s): Majid Beidaghi; Wei Chen; Chunlei Wang
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Paper Abstract

Development of miniaturized electronic systems has stimulated the demand for miniaturized power sources that can be integrated into such systems. Among the different micro power sources micro electrochemical energy storage and conversion devices are particularly attractive because of their high efficiency and relatively high energy density. Electrochemical micro-capacitors or micro-supercapacitors offer higher power density compared to micro-batteries and micro-fuel cells. In this paper, development of on-chip micro-supercapacitors based on interdigitated C-MEMS electrode microarrays is introduced. C-MEMS electrodes are employed both as electrode material for electric double layer capacitor (EDLC) or as three dimensional (3D) current collectors of EDLC or pseudo-capacitive materials. Recent advancements in fabrication methods of C-MEMS based micro-supercapacitors are discussed and electrochemical properties of C-MEMS electrodes and it composites are reviewed.

Paper Details

Date Published: 17 May 2011
PDF: 7 pages
Proc. SPIE 8035, Energy Harvesting and Storage: Materials, Devices, and Applications II, 80350J (17 May 2011); doi: 10.1117/12.884350
Show Author Affiliations
Majid Beidaghi, Florida International Univ. (United States)
Wei Chen, Florida International Univ. (United States)
Chunlei Wang, Florida International Univ. (United States)

Published in SPIE Proceedings Vol. 8035:
Energy Harvesting and Storage: Materials, Devices, and Applications II
Nibir K. Dhar; Priyalal S. Wijewarnasuriya; Achyut K. Dutta, Editor(s)

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