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Proceedings Paper

A compact and portable IR analyzer: progress of a MOEMS FT-IR system for mid-IR sensing
Author(s): Andreas Kenda; Stephan Lüttjohann; Thilo Sandner; Martin Kraft; Andreas Tortschanoff; Arno Simon
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Paper Abstract

We show results on the progress in the development of MOEMS based FT spectrometers dedicated to operate in the mid-IR. Recent research is performed within an EC-FP7 project with the goal to show the feasibility of miniaturized high performance infrared spectroscopic chemical analyzers. Exploiting the high analyte selectivity of the mid-IR paired with the inherent sensitivity of an FT-IR spectrometer, such devices could be used in a wide range of applications, from air monitoring over in-line real-time process control to security monitoring. For practical applicability in these fields, appropriate detection limits and spectral quality standards have to be met. The presented system aims at a performance to measure in the range between 4000-700 cm-1 at a spectral resolution better than 10 cm-1, which would clearly outmatch previous MOEMS based spectrometer approaches. A further technological advantage is the rapid-scan capability. The MOEMS devices oscillate at 500 Hz. A spectrometer based on this device can acquire 1,000 scans per second in forward-backward mode. The interplay of all these components with the challenges in system integration will be described in detail and experimental results will be shown, presenting a significant step forward in smart spectroscopic sensors, microsystems technology and vibrational spectroscopy instrumentation.

Paper Details

Date Published: 12 May 2011
PDF: 8 pages
Proc. SPIE 8032, Next-Generation Spectroscopic Technologies IV, 80320O (12 May 2011); doi: 10.1117/12.883841
Show Author Affiliations
Andreas Kenda, Carinthian Tech Research AG (Austria)
Stephan Lüttjohann, Bruker Optik GmbH (Germany)
Thilo Sandner, Fraunhofer Institute for Photonic Microsystems (Germany)
Martin Kraft, Carinthian Tech Research AG (Austria)
Andreas Tortschanoff, Carinthian Tech Research AG (Austria)
Arno Simon, Bruker Optik GmbH (Germany)

Published in SPIE Proceedings Vol. 8032:
Next-Generation Spectroscopic Technologies IV
Mark A. Druy; Richard A. Crocombe, Editor(s)

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