Share Email Print

Proceedings Paper

Comparison of two LTCC pressure sensors
Author(s): Cosmin Tămaş; Cristina Marghescu; Ciprian Ionescu; Alexandru Vasile
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

LTCC (Low Temperature Co-Fired Ceramic) has great potential in the field of sensors and transducers due to its thermal, electrical and mechanical properties. The paper describes mainly work concerning a piezoresistive pressure sensor realized on LTCC with thick-film deposition technologies. The most important part of a piezoresistive pressure sensor is the membrane. A deflection appears when pressure is applied. Bonded to the membrane is a Wheatstone bridge - when the membrane is deformed a current imbalance follows [1]. The measurement system is realized as two independent functional blocks. The converting and interfacing block, situated close to the sensor is a specialized circuit, AD7730. This circuit contains an amplifier with variable casting, a delta-sigma converter, a digital programmable filter to eliminate errors and an internal calibration and I2C interface with the outer unit. The signal delivered by the sensor is processed and displayed by the microcontroller (in our case PIC16F73). The capacitance value is displayed on an LCD (liquid crystal display) with 2 lines and 16 columns. Another possibility is to connect the circuit to a PC for long term study and in order to allow complex operations and to build up graphs. We shall compare the circuit for this piezoresistive sensor with that for a capacitive pressure sensor realized on LTCC [2].

Paper Details

Date Published: 7 December 2010
PDF: 6 pages
Proc. SPIE 7821, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies V, 78211V (7 December 2010); doi: 10.1117/12.883461
Show Author Affiliations
Cosmin Tămaş, Politehnica Univ. of Bucharest (Romania)
Cristina Marghescu, Politehnica Univ. of Bucharest (Romania)
Ciprian Ionescu, Politehnica Univ. of Bucharest (Romania)
Alexandru Vasile, Politehnica Univ. of Bucharest (Romania)

Published in SPIE Proceedings Vol. 7821:
Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies V
Paul Schiopu; George Caruntu, Editor(s)

© SPIE. Terms of Use
Back to Top