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Proceedings Paper

Generalized accelerated hyperspectral, and multiframe algorithm for nondestructive micro-electromechanical systems (MEMS) microscope metrology
Author(s): Wojtek J. Walecki; Fanny Szondy
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Date Published:
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Proc. SPIE 8056, Visual Information Processing XX, 80560X; doi: 10.1117/12.883414
Show Author Affiliations
Wojtek J. Walecki, Sunrise Optical LLC (United States)
Fanny Szondy, Sunrise Optical LLC (United States)


Published in SPIE Proceedings Vol. 8056:
Visual Information Processing XX
Zia-ur Rahman; Stephen E. Reichenbach; Mark Allen Neifeld, Editor(s)

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