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Proceedings Paper

Developments in MEMS scale printable alkaline and Li-ion technology
Author(s): K. A. Littau; C. L. Cobb; N. Spengler; S. Solberg; M. Weisberg; N. Chang; A. Rodkin
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Paper Abstract

Two technologies for MEMS (Microelectromechanical Systems) scale cell formation are discussed. First, the fabrication of planar alkaline cell batteries compatible with MEMS scale power storage applications is shown. Both mm scale and sub-mm scale individual cells and batteries have been constructed. The chosen coplanar electrode geometry allows for easy fabrication of series connected cells enabling higher voltage while simplifying the cell sealing and electrode formation. The Zn/Ag alkaline system is used due to the large operating voltage, inherent charge capacity, long shelf life, and ease of fabrication. Several cells have been constructed using both plated and spun-on silver. The plated cells are shown to be limited in performance due to inadequate surface area and porosity; however, the cells made from spun-on colloidal silver show reasonable charge capacity and power performance with current densities of up to 200 uA/mm2 and charge capacities of up to 18 mA-s/mm2. Second, a new printing method for interdigitated 3-D cells is introduced. A microfluidic printhead capable of dispensing multiple materials at high resolution and aspect ratio is described and used to form fine interdigitated cell features which show >10 times improvement in energy density. Representative structures enabled by this method are modeled, and the energy and power density improvements are reported.

Paper Details

Date Published: 13 May 2011
PDF: 10 pages
Proc. SPIE 8031, Micro- and Nanotechnology Sensors, Systems, and Applications III, 80311L (13 May 2011); doi: 10.1117/12.883311
Show Author Affiliations
K. A. Littau, Palo Alto Research Center, Inc. (United States)
C. L. Cobb, Palo Alto Research Center, Inc. (United States)
N. Spengler, Palo Alto Research Center, Inc. (United States)
S. Solberg, Palo Alto Research Center, Inc. (United States)
M. Weisberg, Palo Alto Research Center, Inc. (United States)
N. Chang, Palo Alto Research Center, Inc. (United States)
A. Rodkin, Palo Alto Research Center, Inc. (United States)


Published in SPIE Proceedings Vol. 8031:
Micro- and Nanotechnology Sensors, Systems, and Applications III
Thomas George; M. Saif Islam; Achyut K. Dutta, Editor(s)

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