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Proceedings Paper

Effect of surface chemistry on the quality factors of micromechanical resonators
Author(s): Joshua A. Henry; Yu Wang; Melissa A. Hines
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Paper Abstract

Single monolayers of molecules were found to strongly affect the quality factors of MHz-range torsional silicon resonators. By changing a single monolayer of molecules on the surface of a 5-μm-wide, 250-nm-thick silicon resonator - less than 0.07% of the total mass - the quality factor of the resonator was increased by 70%. In contrast, the standard commercial coating, a thin layer of silicon oxide, dissipates at least 75% of the mechanical energy in similarly sized resonators. Since the relative importance of these surface chemical losses scales with the resonator's surface-to-volume ratio, the development of low-loss, stable surface chemistries will be important for the production of high-performance micro- and nano-mechanical devices.

Paper Details

Date Published: 13 May 2011
PDF: 7 pages
Proc. SPIE 8031, Micro- and Nanotechnology Sensors, Systems, and Applications III, 80311A (13 May 2011); doi: 10.1117/12.883185
Show Author Affiliations
Joshua A. Henry, Cornell Univ. (United States)
Yu Wang, Cornell Univ. (United States)
Melissa A. Hines, Cornell Univ. (United States)

Published in SPIE Proceedings Vol. 8031:
Micro- and Nanotechnology Sensors, Systems, and Applications III
Thomas George; M. Saif Islam; Achyut K. Dutta, Editor(s)

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