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Proceedings Paper

Mechanical stress sensors using micromachined grating fibers
Author(s): Hironori Kumazaki; Munehiro Hiramatsu; Hisakazu Oguri; Seiki Inaba; Kazuhiro Hane
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Paper Abstract

We discuss mechanical stress sensors based on fiber Bragg gratings (FBGs) micromachined by anisotropic reactive ion etching (RIE) using CF4 plasma. Locally thinned FBGs have the potential to be used as sensitive strain sensors whose sensitivities increase with decreasing measurement range. The center reflection wavelength shift rate of an etched and thinned grating (thinned grating length: 2.0 mm; thinned diameter: 15 μm; total grating length: 10.0 mm) was approximately 15 times greater than that of a conventional unprocessed FBG. The difference in the center reflection wavelengths of thinned and unetched grating regions could be used to counteract changes in the surrounding temperature. On the other hand, a single FBG with an asymmetrical cross section can detect the degree of curvature and the bending direction. The center reflection wavelength shifted by 0.4 nm at 1550 nm on bending that imparted a radius of curvature of ±127 mm.

Paper Details

Date Published: 18 May 2011
PDF: 4 pages
Proc. SPIE 7753, 21st International Conference on Optical Fiber Sensors, 775394 (18 May 2011); doi: 10.1117/12.882857
Show Author Affiliations
Hironori Kumazaki, Gifu National College of Technology (Japan)
Munehiro Hiramatsu, Gifu National College of Technology (Japan)
Hisakazu Oguri, Gifu National College of Technology (Japan)
Seiki Inaba, Gifu National College of Technology (Japan)
Kazuhiro Hane, Tohoku Univ. (Japan)


Published in SPIE Proceedings Vol. 7753:
21st International Conference on Optical Fiber Sensors
Jacques Albert; Wojtek J. Bock, Editor(s)

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